UC Santa Barbara
Nanofabrication Facility
Chase 2 | etch gases
Cleanroom
Expertly Maintained Facilities
Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.
The Nanofab provides the supplies, facilities, equipment and know-how needed to accomplish your cutting-edge research.
Facilities
Class 100 in Lithography bays, Class 1000 elsewhere
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Calibrated Hotplates checked weekly, ±1°C
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De-Ionized Water ≥ 18MΩ, Low-particle Nitrogen guns
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Environmental sensors monitored & alarmed (especially in Lithography Bays)
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Re-usable anti-static cleanroom gowns with laundry service
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Many supplies provided, such as notebooks, toolboxes, chemicals, deposition source materials and other ancilliaries
Equipment
Rapid response to equipment & facilities failures
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Minimized equipment downtime with high ratio of industry-experienced staff to equipment
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Regular periodic maintenance
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Responsive to user process needs
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Equipment reservations on SignupMonkey
Process
Stepper Lithography Systems calibrated weekly
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Regular Process Monitoring for PECVD systems
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Qualified processes on many etch systems
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Historical process monitoring to validate system performance
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Starting Recipes and Historical Data on the NanoFab Wiki
(Click on a bay to learn more)
User Supplies / Storage
Entryway
Hangers / Racks
Gowning Room