UC Santa Barbara
Nanofabrication Facility
Chase 2 | etch gases
Cleanroom
Expertly Maintained Facilities
Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.
The Nanofab provides the supplies, facilities, equipment and know-how needed to accomplish your cutting-edge research.
Facilities
Class 100 in Lithography bays, Class 1000 elsewhere
Calibrated Hotplates checked weekly, ±1°C
De-Ionized Water ≥ 18MΩ, Low-particle Nitrogen guns
Environmental sensors monitored & alarmed (especially in Lithography Bays)
Re-usable anti-static cleanroom gowns with laundry service
Many supplies provided, such as notebooks, toolboxes, chemicals, deposition source materials and other ancilliaries
Equipment
Rapid response to equipment & facilities failures
Minimized equipment downtime with high ratio of industry-experienced staff to equipment
Regular periodic maintenance
Responsive to user process needs
Equipment reservations on SignupMonkey
Process
Stepper Lithography Systems calibrated weekly
Regular Process Monitoring for PECVD systems
Qualified processes on many etch systems
Historical process monitoring to validate system performance
Starting Recipes and Historical Data on the NanoFab Wiki
(Click on a bay to learn more)
User Supplies / Storage
Entryway
Hangers / Racks
Gowning Room